====== Fe (5000) into Layer 1                   =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
--------------------------------------------------------------------
    Recoil/Damage Calculations made with Kinchin-Pease Estimates    
--------------------------------------------------------------------
----------------------------------------------------------------
  There are NO RECOILS unless a full TRIM calculation is made.   
----------------------------------------------------------------
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 5000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     4.E+04 A   Layer # 1- Density = 11.29E22 atoms/cm3 = 2.253 g/cm3
  Layer # 1-  C = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =1000.00
 Ion Average Range =   241.7E+02 A   Straggling =   195.5E+01 A
 Ion Lateral Range =   152.6E+01 A   Straggling =   194.3E+01 A
 Ion Radial  Range =   241.6E+01 A   Straggling =   128.5E+01 A
====================================================================
 Range Skewne- = -001.4088  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 006.3638  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe       Recoil     
   (Ang.)       Ions     Distribution
-----------  ----------  ------------
350010.E-03  0.0000E+00  0.0000E+00
700010.E-03  0.0000E+00  0.0000E+00
105001.E-02  0.0000E+00  0.0000E+00
140001.E-02  0.0000E+00  0.0000E+00
175001.E-02  0.0000E+00  0.0000E+00
210001.E-02  0.0000E+00  0.0000E+00
245001.E-02  0.0000E+00  0.0000E+00
280001.E-02  0.0000E+00  0.0000E+00
315001.E-02  0.0000E+00  0.0000E+00
350001.E-02  0.0000E+00  0.0000E+00
385001.E-02  0.0000E+00  0.0000E+00
420001.E-02  0.0000E+00  0.0000E+00
455001.E-02  0.0000E+00  0.0000E+00
490001.E-02  0.0000E+00  0.0000E+00
525001.E-02  0.0000E+00  0.0000E+00
560001.E-02  0.0000E+00  0.0000E+00
595001.E-02  0.0000E+00  0.0000E+00
630001.E-02  0.0000E+00  0.0000E+00
665001.E-02  0.0000E+00  0.0000E+00
700001.E-02  0.0000E+00  0.0000E+00
735001.E-02  0.0000E+00  0.0000E+00
770001.E-02  0.0000E+00  0.0000E+00
805001.E-02  0.0000E+00  0.0000E+00
840001.E-02  0.0000E+00  0.0000E+00
875001.E-02  0.0000E+00  0.0000E+00
910001.E-02  0.0000E+00  0.0000E+00
945001.E-02  0.0000E+00  0.0000E+00
980001.E-02  0.0000E+00  0.0000E+00
101500.E-01  0.0000E+00  0.0000E+00
105000.E-01  0.0000E+00  0.0000E+00
108500.E-01  0.0000E+00  0.0000E+00
112000.E-01  0.0000E+00  0.0000E+00
115500.E-01  0.0000E+00  0.0000E+00
119000.E-01  0.0000E+00  0.0000E+00
122500.E-01  0.0000E+00  0.0000E+00
126000.E-01  2.8571E+02  0.0000E+00
129500.E-01  0.0000E+00  0.0000E+00
133000.E-01  0.0000E+00  0.0000E+00
136500.E-01  0.0000E+00  0.0000E+00
140000.E-01  0.0000E+00  0.0000E+00
143500.E-01  0.0000E+00  0.0000E+00
147000.E-01  0.0000E+00  0.0000E+00
150500.E-01  2.8571E+02  0.0000E+00
154000.E-01  2.8571E+02  0.0000E+00
157500.E-01  2.8571E+02  0.0000E+00
161000.E-01  2.8571E+02  0.0000E+00
164500.E-01  2.8571E+02  0.0000E+00
168000.E-01  0.0000E+00  0.0000E+00
171500.E-01  8.5714E+02  0.0000E+00
175000.E-01  2.8571E+02  0.0000E+00
178500.E-01  2.8571E+02  0.0000E+00
182000.E-01  1.1429E+03  0.0000E+00
185500.E-01  5.7143E+02  0.0000E+00
189000.E-01  2.8571E+02  0.0000E+00
192500.E-01  2.0000E+03  0.0000E+00
196000.E-01  2.8571E+03  0.0000E+00
199500.E-01  2.2857E+03  0.0000E+00
203000.E-01  2.0000E+03  0.0000E+00
206500.E-01  2.8571E+03  0.0000E+00
210000.E-01  2.5714E+03  0.0000E+00
213500.E-01  3.7143E+03  0.0000E+00
217000.E-01  3.1429E+03  0.0000E+00
220500.E-01  7.7143E+03  0.0000E+00
224000.E-01  7.1429E+03  0.0000E+00
227500.E-01  1.0857E+04  0.0000E+00
231000.E-01  9.1429E+03  0.0000E+00
234500.E-01  1.6857E+04  0.0000E+00
238000.E-01  2.0857E+04  0.0000E+00
241500.E-01  2.0000E+04  0.0000E+00
245000.E-01  2.3714E+04  0.0000E+00
248500.E-01  2.2857E+04  0.0000E+00
252000.E-01  2.7714E+04  0.0000E+00
255500.E-01  2.4000E+04  0.0000E+00
259000.E-01  2.2000E+04  0.0000E+00
262500.E-01  1.9714E+04  0.0000E+00
266000.E-01  1.1429E+04  0.0000E+00
269500.E-01  8.5714E+03  0.0000E+00
273000.E-01  5.1429E+03  0.0000E+00
276500.E-01  8.5714E+02  0.0000E+00
280000.E-01  2.8571E+02  0.0000E+00
283500.E-01  2.8571E+02  0.0000E+00
287000.E-01  0.0000E+00  0.0000E+00
290500.E-01  0.0000E+00  0.0000E+00
294000.E-01  0.0000E+00  0.0000E+00
297500.E-01  0.0000E+00  0.0000E+00
301000.E-01  0.0000E+00  0.0000E+00
304500.E-01  0.0000E+00  0.0000E+00
308000.E-01  0.0000E+00  0.0000E+00
311500.E-01  0.0000E+00  0.0000E+00
315000.E-01  0.0000E+00  0.0000E+00
318500.E-01  0.0000E+00  0.0000E+00
322000.E-01  0.0000E+00  0.0000E+00
325500.E-01  0.0000E+00  0.0000E+00
329000.E-01  0.0000E+00  0.0000E+00
332500.E-01  0.0000E+00  0.0000E+00
336000.E-01  0.0000E+00  0.0000E+00
339500.E-01  0.0000E+00  0.0000E+00
343000.E-01  0.0000E+00  0.0000E+00
346500.E-01  0.0000E+00  0.0000E+00
350000.E-01  0.0000E+00  0.0000E+00
